
B-63943EN-1/02 1.AXIS CONTROL
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1.3 ERROR COMPENSATION
1.3.1 Stored Pitch Error Compensation
Overview
If pitch error compensation data is specified, pitch errors of each axis
can be compensated in detection units per axis.
Pitch error compensation data is set for each compensation position at
the intervals specified for each axis. The origin of compensation is the
reference position to which the tool is returned.
Pitch error compensation data can be set with external devices such as
the Handy File (see User's manual). Compensation data can also be set
directly with the MDI panel.
The following parameters must be set for pitch error compensation.
Set the pitch error compensation value for each pitch error
compensation position number set by these parameters.
In the following example, 33 is set for the pitch error compensation
number at the reference position.
Compensation number for the
reference position (No. 3620)
1
2
3
333231
34 35 36 37
Compensation number for the
compensation position having
the largest value (No. 3622)
-1
-2
Compensation number for the
compensation position having
the smallest value
No. 3621
Compensation
position number
Compensation
value to be set
34 35 36 3731 32 33
-3 +1 +1 +1 +2 -1 -3
Reference position
Compensation interval
parameter (No. 3624)
Compensation magnification
parameter (No. 3623)
Pitch error compensation value (absolute value)
- Pitch error compensation position at the reference position (for
each axis): Parameter 3620
- Pitch error compensation position having the smallest value (for
each axis): Parameter 3621
- Pitch error compensation position having the largest value (for
each axis): Parameter 3622
- Pitch error compensation magnification (for each axis):
Parameter 3623
- Interval of the pitch error compensation positions (for each axis):
Parameter 3624