
B.PARAMETERS SET WITH VALUES IN DETECTION UNITS APPENDIX B-65270EN/05
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No. Description
5473 Compensation γ at compensation point number c for individual axis
5474 Compensation ε at compensation point number d for individual axis
5504 Compensation point number d for movement axis 1 subjected to straightness compensation
5551 Compensation at compensation point number a for movement axis 1
5552 Compensation at compensation point number b for movement axis 1
5553 Compensation at compensation point number c for movement axis 1
5554 Compensation at compensation point number d for movement axis 1
5561 Compensation at compensation point number a for movement axis 2
5562 Compensation at compensation point number b for movement axis 2
5563 Compensation at compensation point number c for movement axis 2
5564 Compensation at compensation point number d for movement axis 2
5571 Compensation at compensation point number a for movement axis 3
5572 Compensation at compensation point number b for movement axis 3
5573 Compensation at compensation point number c for movement axis 3
5574 Compensation at compensation point number d for movement axis 3
5591 Compensation magnification 1 for movement axis 1 subjected to straightness compensation
5592 Compensation magnification 1 for movement axis 2 subjected to straightness compensation
5593 Compensation magnification 1 for movement axis 3 subjected to straightness compensation
5594 Compensation magnification 1 for movement axis 4 subjected to straightness compensation
5595 Compensation magnification 1 for movement axis 5 subjected to straightness compensation